반도체장비
PKG공정
System Performance 1) Cycle time : 200ms 2) XY placement : ±1.5mil@3σ 3) Die rotation : ±3°@3σ Material Handling Capability 1) Die size : Min.0.15mm ~ Max.2.50mm 2) Substrate size : - Length : Min.120mm ~ Max.260mm - Width : Min.20