Performance Scan Length: 10 mm, Scan Speed: 2 μm/sec to 200 μm/sec Step Height Repeatability: 7.5 ？ or 0.1% Typical Repeatability : 4 ？, 1 sigma Vertical resolution : 0.1 ？ or under 1 ？ Theta resolution : more than 0.01°. Step Height Met