반도체장비
Chip공정
- Main Body ○ Size(mm): upto 2200x1000x1985 mm, Body: Press Ivory PVC upto 8t, 5t covering ○ Frame: SS41 Square pipe frame with anti-corrosive paint coated ○ Anti Static N2 Gun & 0.01um filter (1set), Anti Static DI Gun (1set) ○ Pipe plumbing: PF