반도체장비
Chip공정
Polishing Plate & Unit Plate Size : Ø457mm×Ø180mm Lapping Plate Speed : 1 ~ 250 rpm Setting Time : 0.1 ~ 999 min Polishing Spindle Unit Ball Bearing Type Motor Drive (kW) : HITACHI 2.2kW 6P Plate Size: O.DØ457 mm x I.DØ180 mm