반도체장비
Chip공정
Wheel Spindle Unit Ball bearing spindle Drive : Siemens Motor 1.5Kw, 220V, 50Hz, 3P by Inverter Control Wheel specification: Ø180×5mmt×5mmh Wheel speed: 0~1500 rpm variable Spindle Surface/Circular Run-out : ≤ 3 μm Work Spindle Unit