Wafer Stage (substrate holder) CAPACITY : 2” Sapphire, Si, GaN Wafer Loading (42 Pocket Tray) 4" Sapphire, Si, GaN Wafer Loading (5 Pocket Tray) 6“ Sapphire, Si, GaN Wafer Loading (3 Pocket Tray) FILM DEPOSITION UNIFORMITY : ±5% 이내(STD DEV.)