RTA Chamber Unit 2” Sapphire, Si, GaN Wafer Loading (4 each Pocket Tray) 4" Sapphire, Si, GaN Wafer Loading ( 1 Pocket Tray) 6“ Sapphire, Si, GaN Wafer Loading (1 Pocket Tray) Lamp Unit Lamp Type : Tungsten Halogen ( Circular type or oth