반도체장비
Chip공정
- Main Body ○ Size(mm): upto 2000x900x1985, Body: SUS304 Plate covering ○ Frame: SUS304 Square pipe frame ○ Anti Static N2 Gun & 0.01um filter (1set), Anti Static DI Gun (1set) ○ Pipe plumbing: PFA tube & C-PVC, PVC pipe, Supply unit : SUS 304