반도체장비
PKG공정
일반사양 - Wire pull cartridge : 100 g - Ball shear cartridge : 250 g - Die shear cartridge : 5 kg - Total system acuuracy : ± 0.25 % - Calibration jig : shear jig (1:1, 4:1, 40:1) Wire pull 사양 - 최소 분해능 : 1 mg - Hook 규격 : 2 mil (0.7 ~