전압/전류/전력측정장비
공정분석
1. 구 성 - HPSMU (High Power Source monitor unit) Supplement - GNDU: Ground Unit 2. Performance - Output Terminal / Connection ○ Dual triaxial connectors, Kelvin (remote sensing) - HPSMU Supplement ○ Voltage: 0 V to ± 200 V ○ Current